FabGuard

FabGuard is a comprehensive software suite developed by Inficon specifically designed for fabs to improve productivity and yield in semiconductor manufacturing.

FabGuard offers real-time data collection, advanced analytics, fault detection and classification (FDC), advanced process control (APC), virtual metrology (VM), equipment health monitoring, and predictive maintenance capabilities.

FabGuard enables fabs to monitor and analyze manufacturing processes in real-time, providing valuable insights that help identify and address issues that impact productivity. Its advanced analytics and decision-making tools optimize equipment utilization and improve overall efficiency.

Through its fault detection and classification (FDC) and advanced process control (APC) modules, FabGuard helps identify process variations, reduce defects, and maintain tighter control over critical parameters, leading to improved yield rates.

Virtual metrology is a technique that leverages mathematical models to estimate in-line measurements based on other available data, eliminating the need for physical measurement equipment. VM in FabGuard enables real-time estimation of critical parameters, reducing production costs and cycle time.

FabGuard continuously monitors equipment performance metrics, detects anomalies, and provides actionable insights into potential equipment failures. By proactively identifying issues, it helps minimize unplanned downtime, optimize maintenance schedules, and extend equipment lifespan.

Predictive maintenance in FabGuard uses sensors and data analysis techniques to identify early signs of equipment degradation or failure. By predicting maintenance requirements, fabs can avoid costly unexpected breakdowns, reduce downtime, and optimize maintenance activities.

Yes, FabGuard is designed to integrate with a wide range of manufacturing equipment and software systems commonly used in the semiconductor industry, providing seamless connectivity and data exchange for comprehensive fab management.

Absolutely. Inficon understands that each fab has unique needs, and FabGuard offers configurability and customization options to adapt to specific manufacturing processes, equipment, and workflows.

Inficon provides comprehensive support for FabGuard implementation, including consulting services, training, and ongoing technical assistance. Their team ensures a smooth integration into existing fab environments and assists in maximizing the benefits of FabGuard.