FabGuard

FabGuard is a comprehensive software suite offered by Inficon, a leading provider of process control and metrology solutions for the semiconductor manufacturing industry. The software suite includes advanced process control (APC), fault detection and classification (FDC), and automated defect classification (ADC) tools that enable semiconductor fabs to optimize their processes, reduce variability and improve yield.

FabGuard’s APC module uses advanced algorithms to monitor key process parameters in real-time, make predictive adjustments and alert engineers to potential issues before they affect product quality. The FDC module enables fabs to detect deviations from normal process behavior, identify the root cause of any abnormities and implement corrective actions accordingly.

The ADC module automates the process of defect classification for both standard and complex fault patterns, reducing manual intervention and improving accuracy. Fabricators can use FabGuard’s web-based interface to customize dashboards that display critical insights related to process performance, as well as to generate automated reports that help to track progress over time.

Designed for flexibility and scalability, FabGuard can be easily integrated with other manufacturing execution system (MES) platforms and is suitable for use in various semiconductor manufacturing applications, including wafer production, die attach, wire bonding, molding and packaging.

• Advanced process control
• Fault detection and classification
• Automated defect classification
• Customizable dashboards
• Web-based interface
• Easily integratable with other MES platforms

With FabGuard, Inficon provides semiconductor fabs with a comprehensive suite of tools that enable them to improve the quality and reliability of their products while reducing costs and increasing yields.